Institute for Microelectronics and Microsystems (IMM) Bologna

The Institute for Microelectronics and Microsystems (IMM) of the Italian National Council of Research (CNR) is a no-profit public research organization and owns in Bologna the largest public silicon micro fabrication facility existing in Italy, equipped with state-of-the-art instrumentations for MEMS processing, including UV lithography, front/backside mask alignment, plasma etching of metallic and dielectric thin films, Deep Reactive Ion Etching of silicon and SiO2, thin film deposition, wafer bonding, dicing and wire bonding. During the last few years, the MEMS group working at IMM in Bologna has been developing and investigating various innovative devices obtained by micro-fabrication technology such as thermal MEMS for chemical gas sensing, Single-Photon Avalanche Diodes (SPAD) for ultra-sensitive light detection, silicon micro-fluidic devices (for both gases and liquids) for industrial automation and miniaturized gas chromatography, silicon MEMS resonators for strain sensing.

The development of miniaturized gas-chromatographic systems based on micro-machined components, including pre-concentration cartridges, separation columns and solid state detectors for indoor or outdoor air quality assessment, agro-food as well as safety&security applications, is one of the core activities of IMM Bologna Unit, and has been awarded at the IEEE Sensors 2006 and 2007 conferences.

Staff Engaged in Project

Stefano Zampolli (M)

Stefano Zampolli (M) graduated in Physics at the University of Bologna in 2000, discussing a thesis on the application of Fuzzy Logic for detection of buried landmines. He is a grant student at CNR – IMM Bologna since April 2000, working primarily on gas sensor characterization and data processing within the sensor and microsystem R&D program. Since 2005 he is Researcher in the sensors and microsystem group at CNR-IMM, designing and developing gas sensors and gas sensing Microsystems for environmental monitoring, safety & security and agrofood applications.

Ivan Elmi (M)

Ivan Elmi (M) graduated in Physics at the University of Bologna in 1998, discussing a thesis on characterization of Sensors for Benzene detection. Since April 1999 he is working as grant student at CNR - IMM Bologna within the sensor and microsystem R&D program, primarily developing a system for environmental monitoring and characterizing gas sensors and miniaturized GC systems.

Gian Carlo Cardinali (M)

Gian Carlo Cardinali (M) received a degree (cum laude) in electronic engineering from the University of Bologna, Italy, in 1979. Since 1982 he has been working at the IMM (formerly LAMEL) Institute. His scientific interests are in the areas of design, fabrication, and testing of electronic devices, sensors and microsystems. From 1992 onwards he has been involved in research projects dealing with the implementation of microsystems and he is currently leading the CNR IMM Bologna MEMS activities. Over the past ten years he has participated to several projects in the MST field, most of them dealing with the development of microsystems for gas analysis and detection based on infrared and gas chromatographic techniques.